In a food processor pulse cream cheese, sugar, zest and vanilla to combine. Add blueberries and pulse until mixed.
Cut 24 small rounds of waxed paper and fit each into a cup of a 24-cup miniature muffin tin. Divide blueberry mixture among cups, spooning in mixture on top of waxed paper. Gently smooth with an offset spatula or back of a teaspoon. Place 1 vanilla wafer, flat side up, on top of each cup, pressing gently to adhere. Cover with plastic and refrigerate for at least 2 hours or overnight.
To remove cheesecakes, run a warm, thin knife around each, then slide tip of knife under and lift out.